摘要:
An exhaust gas flow rate measuring equipment for internal combustion engines supplies helium gas only to a trace gas analyzer. The condition in which the inside of the trace gas analyzer in the high-vacuum stage causes pressure fluctuation due to the viscosity of the exhaust gas and the introduction rate of helium gas fluctuates in proportion to the fluctuation rate can be prevented. Also the, problem of the sensitivity varying in accordance with the gas component ratio in the exhaust gas can be solved.