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公开(公告)号：US07933189B2
公开(公告)日：2011-04-26
申请号：US12423911
申请日：2009-04-15
申请人： Takeshi Omori , Takaaki Kassai , Kenji Maebara , Keiji Fujita , Hiroaki Ashiwa
发明人： Takeshi Omori , Takaaki Kassai , Kenji Maebara , Keiji Fujita , Hiroaki Ashiwa
IPC分类号： G11B7/00
CPC分类号： G11B7/0909 , G11B7/261
摘要： In a focus optical system for optical discs or optical disc master exposure apparatuses, a relative positional relation between a cylindrical lens and a 4-division detector in an astigmatic optical system is adjust so that an interference fringe appearing in reflected light derived from an optical disc master is made to be incident on a dead zone of the 4-division detector. Thus, an astigmatic focus servo free from effects of variations in a focus error signal due to the interference fringe is realized. As a result of this, effects of the interference fringe appearing in the reflected light derived from an optical disc or optical disc master can be suppressed.
摘要翻译： 在用于光盘或光盘主曝光装置的聚焦光学系统中，调整像散光学系统中的柱面透镜和4分辨率检测器之间的相对位置关系，使得出现在来自光盘的反射光中的干涉条纹 主人被发现在四分之一检测器的死区。 因此，实现了不受干涉条纹引起的聚焦误差信号变化影响的像散聚焦伺服。 结果，可以抑制出现在从光盘或光盘母盘导出的反射光中的干涉条纹的影响。
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公开(公告)号：US20050204573A1
公开(公告)日：2005-09-22
申请号：US11014947
申请日：2004-12-20
摘要： A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.
摘要翻译： 用于获得测量目标面上的位置信息的测量探针具有：具有形成在其顶部并与测量对象面接触的接触部分的可动部件和形成在其基端的用于反射测量光的反射面 光束; 安装在可动件上的磁性物质; 以固定状态设置的固定部件; 设置在所述固定构件上用于沿轴线方向可移动地支撑所述可动构件的轴承; 以及磁力产生部，其设置在所述固定部件上，用于产生作用在所述磁性物质上的力，以使所述可动部件沿所述轴线方向移动。 可动构件由非磁性材料形成，并且轴承和固定构件由磁性材料形成。
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公开(公告)号：US07029224B2
公开(公告)日：2006-04-18
申请号：US10384791
申请日：2003-03-11
IPC分类号： B25J17/02
CPC分类号： H01L21/67742 , B25J15/103 , H01L21/68707 , Y10T74/20335
摘要： A method for transferring a thin plate is provided, in which three or more grasping claws of a transfer arm grasp the periphery of the thin plate in order to transfer it to a predetermined transfer position, and three or more holding claws hold the periphery of the thin plate in the transfer position. The transfer arm rotates about a shaft which is in a direction of a vector sum of a first vector perpendicular to a surface of the thin plate before transfer, and a second vector perpendicular to the surface of the thin plate after the transfer, to transfer the thin plate with changing the posture thereof.
摘要翻译： 提供一种用于传送薄板的方法，其中传送臂的三个或更多个把持爪抓住薄板的周边以便将其传送到预定的传送位置，并且三个或更多个夹持爪保持 薄板处于转移位置。 传送臂围绕转轴旋转，该轴在转印之前沿垂直于薄板的表面的第一矢量的矢量方向和在转印之后垂直于薄板表面的第二矢量转动， 改变其姿势的薄板。
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公开(公告)号：US07065893B2
公开(公告)日：2006-06-27
申请号：US11014947
申请日：2004-12-20
IPC分类号： G01B5/00
摘要： A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.
摘要翻译： 用于获得测量目标面上的位置信息的测量探针具有：具有形成在其顶部并与测量对象面接触的接触部分的可动部件和形成在其基端的用于反射测量光的反射面 光束; 安装在可动件上的磁性物质; 以固定状态设置的固定部件; 设置在所述固定构件上用于沿轴线方向可移动地支撑所述可动构件的轴承; 以及磁力产生部，其设置在所述固定部件上，用于产生作用在所述磁性物质上的力，以使所述可动部件沿所述轴线方向移动。 可动构件由非磁性材料形成，并且轴承和固定构件由磁性材料形成。
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