公开(公告)号：US06710542B2

公开(公告)日：2004-03-23

申请号：US10212638

申请日：2002-08-03

申请人： Tan Boon Chun ,  Oon Su Lin ,  Daniel B. Roitman ,  Karen L. Seaward

发明人： Tan Boon Chun ,  Oon Su Lin ,  Daniel B. Roitman ,  Karen L. Seaward

IPC分类号： H05B3304

CPC分类号： H05B33/04 ,  H01L51/5246 ,  H01L51/5256 ,  Y10S428/917

摘要： An electroluminescent device and method for making the same. The electroluminescent device includes a substrate that is impermeable to water and oxygen having a first electrode thereon. An electroluminescent layer is in electrical contact with the first electrode, and a second electrode is in electrical contact with the electroluminescent layer. A seal having layers of epoxy and alternating with layers of SiNH prevents water and oxygen from reaching the second electrode. The epoxy preferably has a cure temperature less than 140° C. Similarly, the silicon nitride layer is preferably deposited at a temperature below 140° C. The layer of SiNH preferably has an etch rate of less than 50 A/sec in 10% HF solution.

摘要翻译： 一种电致发光器件及其制造方法。 电致发光器件包括对其上具有第一电极的水和氧不透水的衬底。 电致发光层与第一电极电接触，第二电极与电致发光层电接触。 具有环氧树脂层并与SiNH层交替的密封件防止水和氧到达第二电极。 环氧树脂优选具有低于140℃的固化温度。类似地，氮化硅层优选在低于140℃的温度下沉积。SiNH层优选在10％HF中具有小于50A / sec的蚀刻速率 解。