公开(公告)号：US20230312406A1

公开(公告)日：2023-10-05

申请号：US18185527

申请日：2023-03-17

Applicant: Techno Quartz Inc.

Inventor： Masahide KATO ,  Yasuhiro UMETSU ,  Yo MATSUURA

IPC: C03C17/10 ,  C03C19/00 ,  C03C23/00 ,  C03C17/22

CPC classification number: C03C17/10 ,  C03C19/00 ,  C03C23/007 ,  C03C17/22 ,  C03C2217/25 ,  C03C2218/112 ,  C03C2218/31 ,  C03C2201/02

Abstract: A method for manufacturing a quartz glass substrate with a coating formed includes: surface roughening for a base surface of the quartz glass substrate, on which the sprayed coating is formed; and a heating treatment of heating the substrate after the surface roughening. The base surface is 0.9 μm or more and 5.0 μm or less in arithmetic mean roughness (Ra) in the surface roughening. The heating treatment is performed at a temperature that is equal to or higher than a strain point (temperature at which the viscosity reaches 1013.5 Pa·sec) of the quartz glass.