Method for manufacturing complex grating masks having phase shifted regions and a holographic set-up for making the same
    1.
    发明申请
    Method for manufacturing complex grating masks having phase shifted regions and a holographic set-up for making the same 审中-公开
    用于制造具有相移区域的复合光栅掩模的方法和用于制造其的全息装置

    公开(公告)号:US20040008413A1

    公开(公告)日:2004-01-15

    申请号:US10431343

    申请日:2003-05-06

    Applicant: Teraxion Inc.

    CPC classification number: G02B5/1871 G02B5/32 G02B27/60

    Abstract: A method for manufacturing complex gratings masks having phase shifted regions and a holographic set-up for making the same are disclosed. The method, which can be easily automated, allows to produce arbitrary phase shift in holographically recorded gratings with high precision. In a preferred embodiment, the phase is controlled by a fringe locking system with a movable locking detector and a phase measuring device such as a camera for example, thereby allowing to provide a real-time phase locking and a real-time calibration of the set-up.

    Abstract translation: 公开了一种用于制造具有相移区域的复合光栅掩模和用于制造其的全息设备的方法。 该方法可以容易地自动化,可以在高精度的全息记录光栅中产生任意的相移。 在优选实施例中,该相位由具有可移动锁定检测器和相位测量装置(例如相机)的边缘锁定系统控制,从而允许提供该组的实时相位锁定和实时校准 -向上。

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