公开(公告)号：US20090178460A1

公开(公告)日：2009-07-16

申请号：US12252940

申请日：2008-10-16

申请人： Tetsuya Abe ,  Toshihisa Hatano ,  Hajime Hiratsuka ,  Koichi Hasegawa ,  Yasuhide Tajima ,  Soichiro Omachi

发明人： Tetsuya Abe ,  Toshihisa Hatano ,  Hajime Hiratsuka ,  Koichi Hasegawa ,  Yasuhide Tajima ,  Soichiro Omachi

IPC分类号： G01N33/20 ,  G01N7/00

CPC分类号： G01N7/14

摘要： A gas amount measuring device including a vacuum container, a first pipe, an air release valve being attached to the first pipe, a second pipe, a calibration gas generator being attached to the first pipe, a third pipe, a vacuum gauge, a first valve, a leak valve, a second valve, a turbomolecular pump, a third valve, and a roughing pump being attached to the third pipe in order from a vacuum container side, a first bypass pipe connecting the third pipe between the vacuum container and the first valve to the third pipe between the leak valve and the second valve, a fourth valve being attached to the first bypass pipe, and a second bypass pipe connecting the third pipe between the leak valve and the second valve to the third pipe between the third valve and the roughing pump, a fifth valve being attached to the second bypass pipe.

摘要翻译： 一种气体量测量装置，包括真空容器，第一管，安装在第一管上的排气阀，第二管，附接到第一管的校准气体发生器，第三管，真空计，第一管 阀，泄漏阀，第二阀，涡轮分子泵，第三阀和粗抽泵，从真空容器侧依次附接到第三管，第一旁通管，将第三管连接在真空容器和 第一阀到泄漏阀和第二阀之间的第三管，第四阀连接到第一旁通管，以及第二旁通管，将第二管和第二阀连接到第三管之间，第三管在第三管之间， 阀和粗抽泵，第五阀连接到第二旁通管。

公开(公告)号：US08042378B2

公开(公告)日：2011-10-25

申请号：US12252940

申请日：2008-10-16

申请人： Tetsuya Abe ,  Toshihisa Hatano ,  Hajime Hiratsuka ,  Koichi Hasegawa ,  Yasuhide Tajima ,  Soichiro Omachi

发明人： Tetsuya Abe ,  Toshihisa Hatano ,  Hajime Hiratsuka ,  Koichi Hasegawa ,  Yasuhide Tajima ,  Soichiro Omachi

IPC分类号： G01N33/20

CPC分类号： G01N7/14

摘要： A gas amount measuring device including a vacuum container, a first pipe, an air release valve being attached to the first pipe, a second pipe, a calibration gas generator being attached to the first pipe, a third pipe, a vacuum gauge, a first valve, a leak valve, a second valve, a turbomolecular pump, a third valve, and a roughing pump being attached to the third pipe in order from a vacuum container side, a first bypass pipe connecting the third pipe between the vacuum container and the first valve to the third pipe between the leak valve and the second valve, a fourth valve being attached to the first bypass pipe, and a second bypass pipe connecting the third pipe between the leak valve and the second valve to the third pipe between the third valve and the roughing pump, a fifth valve being attached to the second bypass pipe.

摘要翻译： 一种气体量测量装置，包括真空容器，第一管，安装在第一管上的排气阀，第二管，附接到第一管的校准气体发生器，第三管，真空计，第一管 阀，泄漏阀，第二阀，涡轮分子泵，第三阀和粗抽泵，从真空容器侧依次附接到第三管，第一旁通管，将第三管连接在真空容器和 第一阀到泄漏阀和第二阀之间的第三管，第四阀连接到第一旁通管，以及第二旁通管，将第二管和第二阀连接到第三管之间，第三管在第三管之间， 阀和粗抽泵，第五阀连接到第二旁通管。