公开(公告)号：US20160138991A1

公开(公告)日：2016-05-19

申请号：US14899632

申请日：2014-06-20

申请人： The Regents of the University of Michigan

发明人： Yogesh GIANCHANDANI ,  Christine EUN ,  Xin LUO ,  Mark KUSHNER ,  Zhongmin XIONG ,  Jun-Chieh WANG

IPC分类号： G01L9/00 ,  E21B47/06

CPC分类号： G01L9/0072 ,  E21B47/06 ,  G01L9/0042 ,  G01L9/0051 ,  G01L9/0073

摘要： The distance between microscale electrodes can be determined from microdischarge current and/or capacitance distribution among a plurality of electrodes. A microdischarge-based pressure sensor includes a reference pair of electrodes on a body of the sensor and a sensing pair of electrodes. One of the electrodes of the sensing pair is on a diaphragm of the sensor so that the distance between the sensing pair of electrodes changes with diaphragm movement, while the distance between the reference pair does not. Plasma and current distribution within a microdischarge chamber of the sensor is sensitive to very small diaphragm deflections. Pressure sensors can be fabricated smaller than ever before, with useful signals from 50 micron diaphragms spaced only 3 microns from the sensor body. The microdischarge-based sensor is capable of operating in harsh environments and can be fabricated along-side similarly configured capacitive sensors.

摘要翻译： 微电极之间的距离可以由多个电极之间的微放电电流和/或电容分布来确定。 基于微放电的压力传感器包括在传感器的主体上的参考电极对和感测对电极。 感测对中的一个电极位于传感器的隔膜上，使得感测对电极之间的距离随隔膜移动而改变，而参考对之间的距离不变。 传感器的微放电室内的等离子体和电流分布对非常小的膜片偏转敏感。 压力传感器的制造可比以往任何时候都小，距离传感器主体距离仅有3微米的50微米隔膜有用的信号。 基于微放电的传感器能​​够在恶劣的环境中工作，并且可以沿着类似配置的电容传感器制造。