System and device for thinning wafers that have contact bumps
    1.
    发明授权
    System and device for thinning wafers that have contact bumps 有权
    具有接触凸块的用于减薄晶片的系统和装置

    公开(公告)号:US07722446B2

    公开(公告)日:2010-05-25

    申请号:US11533609

    申请日:2006-10-17

    IPC分类号: B24B55/04

    CPC分类号: H01L21/78

    摘要: In accordance with the foregoing objects and advantages, the present invention provides a fabrication device that may be used during the grinding operation of the fabrication process. The fabrication device comprises a socket plate that includes a plurality of cavities formed therein that correspond in position and number to the solder (or other conductive material) bumps formed on the front surface of a product wafer.

    摘要翻译: 根据上述目的和优点,本发明提供了可在制造过程的磨削操作期间使用的制造装置。 该制造装置包括插座板,该插座板包括形成在其中的多个空腔,其位置和数量与形成在产品晶片的前表面上的焊料(或其它导电材料)凸起相对应。