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公开(公告)号：US20220270851A1
公开(公告)日：2022-08-25
申请号：US17675228
申请日：2022-02-18
Applicant: Tokyo Electron Limited
Inventor： Takehisa SAITO , Yohei TAMAZAWA , Toshiki NAKAJIMA , Daisuke KURASHINA , Naoki FUJIWARA
Abstract: There is provided an antenna for inductively coupled plasma excitation. The antenna comprises a plurality of coil assemblies and a conductive plate connected to the plurality of coil assemblies, the conductive plate having a central opening and at least one plate terminal.
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