公开(公告)号：US20210104385A1

公开(公告)日：2021-04-08

申请号：US17034265

申请日：2020-09-28

Applicant: Tokyo Electron Limited

Inventor： Ryou SON ,  Tomoyuki TAKAHASHI ,  Sinya SASAKI ,  Masaru SASAKI

IPC: H01J37/32

Abstract: There is provided a substrate support pedestal including: a first metallic member having a recess formed in an upper portion of the first metallic member; a second metallic member provided on the first metallic member and configured to seal the recess; a substrate support part provided on the second metallic member; and one or more thermoelectric elements disposed in the recess, wherein the recess is filled with a heat transfer medium.