公开(公告)号：US12165854B2

公开(公告)日：2024-12-10

申请号：US17504523

申请日：2021-10-19

Applicant: Tokyo Electron Limited

Inventor： Nobutaka Sasaki ,  Shin Matsuura ,  Gyeong min Park ,  Toshiki Akama

IPC: H01J37/32 ,  H01L21/683

Abstract: A substrate support includes a base, a support portion, a first pin member, a second pin member and a driving unit. The base has a first surface on which an object to be supported is placed, a second surface opposite to the first surface, and a first through-hole. The support portion has a third surface in contact with the second surface, a fourth surface opposite to the third surface, and a second through-hole. The first pin member is stored in the first through-hole and a second pin member is stored in the second through-hole. The first through-hole is larger on the second surface side than on the first surface side, and/or the second through-hole is larger on the third surface side than on the fourth surface side.