公开(公告)号：US20110247422A1

公开(公告)日：2011-10-13

申请号：US13085837

申请日：2011-04-13

申请人： Tomohisa TOKUDA ,  Hirofumi TOJO ,  Nozomi KIDA

发明人： Tomohisa TOKUDA ,  Hirofumi TOJO ,  Nozomi KIDA

IPC分类号： G01L13/02

CPC分类号： G01L9/0054 ,  G01L9/0042 ,  G01L15/00 ,  G01L19/02

摘要： A pressure sensor including a sensor chip; a differential pressure diaphragm provided in the center portion of the sensor chip; a first differential pressure gauge formed along a radial direction relative to the center of the differential pressure diaphragm, provided on a first edge of the differential pressure diaphragm; a second differential pressure gauge formed along a circumferential direction, which is perpendicular to the radial direction, provided in the vicinity of the first differential pressure gauge on the first edge of the differential pressure diaphragm; and a static pressure diaphragm disposed between an edge portion of the sensor chip and one of the edges, other than the first edge, of the differential pressure diaphragm, provided to the outside of the differential pressure diaphragm.

摘要翻译： 一种压力传感器，包括传感器芯片; 设置在传感器芯片的中心部分的差压隔膜; 相对于压差隔膜的中心沿径向形成的第一差压计，设置在压差隔膜的第一边缘上; 在压差隔膜的第一边缘处设置在第一差压计附近的沿径向方向的圆周方向形成的第二差压表; 以及设置在传感器芯片的边缘部分和差压压力膜片的除了第一边缘的边缘之一之外的静压力隔膜，设置在差压隔膜的外侧。