公开(公告)号：US20180095166A1

公开(公告)日：2018-04-05

申请号：US15713841

申请日：2017-09-25

Applicant: Topcon Corporation

Inventor： Takahiro INOUE ,  Satoshi YANOBE ,  Hideyuki MATSUMOTO ,  Fumio OHTOMO

IPC: G01S7/481 ,  G01S17/02 ,  G01C3/08 ,  G01B21/04 ,  G01B21/22 ,  G01C15/00 ,  G01C1/04 ,  G01S17/89

CPC classification number: G01S7/4817 ,  G01B11/24 ,  G01B21/04 ,  G01B21/22 ,  G01C1/04 ,  G01C3/08 ,  G01C15/002 ,  G01S17/023 ,  G01S17/89

Abstract: A measurement device and measurement method are provided which are capable of measuring the inclination of a measurement target object surface both with a simple configuration and at high speed. The measurement device includes: a rangefinding light emitting section; a rangefinding unit configured to receive reflected rangefinding light; an optical axis deflection section provided on an optical path common to rangefinding light and reflected rangefinding light, and configured to deflect optical axes thereof; a motor configured to cause the optical axis deflection section to rotate; an emission direction detection unit configured to detect a deflection angle and deflection direction resulting from the optical axis deflection section; and a computation controller that measures the inclination of a measurement target object surface with respect to the emission optical axis on the basis of acquired coordinate data on the measurement target object surface.