-
公开(公告)号：US20190228966A1
公开(公告)日：2019-07-25
申请号：US16165804
申请日：2018-10-19
发明人： XUE-WEN WANG , KAI LIU , JI-WEI HOU , SHENG-ZHE HONG
IPC分类号： H01L21/02
摘要： A method for making patterned two dimensional (2D) transition metal dichalcogenides (TMDs) nanomaterials is disclosed. The method includes making a substrate, wherein the substrate has a substrate surface including a first portion surface and a second portion surface, the first portion surface is formed by oxide or nitride, and the second portion surface is formed by mica; applying a mono 2D TMDs nanomaterials; annealing the mono 2D TMDs nanomaterials and the substrate in an oxygen containing gas, the annealing temperature is controlled so that only the part of the 2D TMDs nanomaterials, that is on the second portion surface, is removed by oxidization, and the other part of the 2D TMDs nanomaterials, that is on the first portion surface, is remained to form the patterned 2D TMDs nanomaterials.
搜索结果
1 条记录 (耗时 0.015 秒)
筛选
AND
AND
过滤
NOT
NOT