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公开(公告)号：US08061738B2
公开(公告)日：2011-11-22
申请号：US12466952
申请日：2009-05-15
IPC分类号： F16L17/00
CPC分类号： F16J15/46 , F16J15/002 , F16J15/025
摘要： A seal member has a configuration including a ring-shaped main body portion, an inner peripheral lip portion protruding from a ring inner peripheral portion of the main body portion and an outer peripheral lip portion protruding from a ring outer peripheral portion of the main body portion. The inner peripheral lip portion takes an O-ring shape deformable in a protruding direction. The outer peripheral lip portion takes a structure deformable in a direction different from an extending direction, corresponding to a pressure in a sealed area. The member preferably seals when in communication with a plurality of spaces separated from an external space, the plurality of spaces from an external environment.
摘要翻译： 密封构件具有环状主体部，从主体部的环内周部突出的内周唇部和从主体部的环外周部突出的外周唇部 。 内周缘部呈O形环状，能够沿突出方向变形。 外周唇部具有与沿着密封区域的压力对应的延伸方向不同的方向变形的构造。 当与从外部空间分离的多个空间与所述多个空间与外部环境隔离时，所述构件优选地密封。
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公开(公告)号：US20070210533A1
公开(公告)日：2007-09-13
申请号：US11675901
申请日：2007-02-16
IPC分类号： F16J15/00
CPC分类号： F16J15/46 , F16J15/002 , F16J15/025
摘要： A seal member has a configuration including a ring-shaped main body portion, an inner peripheral lip portion protruding from a ring inner peripheral portion of the main body portion and an outer peripheral lip portion protruding from a ring outer peripheral portion of the main body portion. The inner peripheral lip portion takes an O-ring shape deformable in a protruding direction. The outer peripheral lip portion takes a structure deformable in a direction different from an extending direction, corresponding to a pressure in a sealed area. The member preferably sealing, when communicating a plurality of spaces separated from an external space, these spaces from an external environment, is thereby provided.
摘要翻译： 密封构件具有环状主体部，从主体部的环内周部突出的内周唇部和从主体部的环外周部突出的外周唇部 。 内周缘部呈O形环状，能够沿突出方向变形。 外周唇部具有与沿着密封区域的压力对应的延伸方向不同的方向变形的构造。 优选地，当将与外部空间分离的多个空间连通时，该构件优选地密封，从而提供这些空间与外部环境。
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公开(公告)号：US20090218773A1
公开(公告)日：2009-09-03
申请号：US12466952
申请日：2009-05-15
IPC分类号： F16J15/02
CPC分类号： F16J15/46 , F16J15/002 , F16J15/025
摘要： A seal member has a configuration including a ring-shaped main body portion, an inner peripheral lip portion protruding from a ring inner peripheral portion of the main body portion and an outer peripheral lip portion protruding from a ring outer peripheral portion of the main body portion. The inner peripheral lip portion takes an O-ring shape deformable in a protruding direction. The outer peripheral lip portion takes a structure deformable in a direction different from an extending direction, corresponding to a pressure in a sealed area. The member preferably sealing, when communicating a plurality of spaces separated from an external space, these spaces from an external environment, is thereby provided.
摘要翻译： 密封构件具有环状主体部，从主体部的环内周部突出的内周唇部和从主体部的环外周部突出的外周唇部 。 内周缘部呈O形环状，能够沿突出方向变形。 外周唇部具有与沿着密封区域的压力对应的延伸方向不同的方向变形的构造。 优选地，当将与外部空间分离的多个空间连通时，所述构件优选地将这些空间与外部环境密封。
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公开(公告)号：US08522836B2
公开(公告)日：2013-09-03
申请号：US13035335
申请日：2011-02-25
申请人： Tsutomu Okabe , Toshihiko Miyajima
发明人： Tsutomu Okabe , Toshihiko Miyajima
IPC分类号： B65B1/04
CPC分类号： H01L21/67393
摘要： The substrate storage pod includes a pod case which includes a hollow inner space for storing a substrate, and an opening; a lid member which is capable of sealing the opening; an exhaust port for exhausting a replacement gas in the hollow inner space of the pod case; and an exhaust space which is defined in the hollow inner space so as to communicate to the exhaust port. The exhaust space is defined in the hollow inner space by a multi-hole partition member including multiple holes and by an inner surface of the pod case. In the substrate storage pod, back pressure on an exhaust side can be lowered, and hence dust in the pod can be collected to the exhaust side.
摘要翻译： 基材储存容器包括一个荚壳，它包括用于储存基材的中空内部空间和开口; 能够密封开口的盖构件; 用于排出所述荚壳的中空内部空间中的置换气体的排气口; 以及限定在中空内部空间中以与排气口连通的排气空间。 排气空间通过包括多个孔的多孔分隔构件和荚壳的内表面限定在中空内空间中。 在基材储存容器中，可以降低排气侧的背压，从而可以将荚内的灰尘收集到排气侧。
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公开(公告)号：US20100117377A1
公开(公告)日：2010-05-13
申请号：US12615359
申请日：2009-11-10
CPC分类号： E05B17/0029 , E05C9/02 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/0964 , Y10T292/1021 , Y10T292/1038
摘要： In a pod used in an FIMS system, an engaged portion is provided on the outer surface of the lid of a pod. A through hole is provided in a flange portion that is provided around the pod opening and in which the lid is to be received. The through-hole allows access to the engaged portion from the external space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that it can slide in a direction parallel to the side wall of the flange. The engagement portion of the latch mechanism reaches the engaged portion through the aforementioned through-hole. Movement of the latch mechanism brings the engagement portion into an engaging state and a disengaged state.
摘要翻译： 在用于FIMS系统的荚中，在荚的盖的外表面上设置一个啮合部分。 在设置在容器开口周围的凸缘部分设有通孔，盖子将被容纳在该通孔中。 通孔允许从外部空间接合被接合部分。 闩锁机构以能够沿与凸缘的侧壁平行的方向滑动的方式支撑在凸缘部的荚体主体侧表面上。 闩锁机构的接合部分通过上述通孔到达接合部分。 闩锁机构的移动使接合部分进入接合状态和脱离状态。
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公开(公告)号：US06984839B2
公开(公告)日：2006-01-10
申请号：US10301841
申请日：2002-11-22
CPC分类号： H01L21/67265 , G01V8/12 , H01L21/67772 , Y10S414/137
摘要： A wafer processing apparatus on which a pod having an opening is detachably mounted is provided with a door unit and a mapping unit provided with a transmitting type sensor having an emitter and a detector forming a slot therebetween. The emitter and the detector are moved toward the opening in the pod and are plunged into the interior of the pod after a door is opened by the door unit, and the slot between the emitter and the detector crosses an end portion of a wafer to thereby detect the presence or absence of the wafer. Thereby, a mechanism portion liable to produce dust which may adhere to the wafer and cause the contamination thereof can be disposed separately from the pod.
摘要翻译： 具有可拆卸地安装有开口的容器的晶片处理装置设置有门单元和映射单元，该单元设置有具有发射器的传输型传感器和在其间形成狭槽的检测器。 发射器和检测器朝向容器中的开口移动，并且在门被门单元打开之后被插入到容器的内部，并且发射器和检测器之间的槽与晶片的端部相交，由此 检测晶片的存在或不存在。 因此，可以与容器分开设置容易产生可能附着在晶片上并导致其污染的灰尘的机构部分。
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公开(公告)号：US08322759B2
公开(公告)日：2012-12-04
申请号：US12615359
申请日：2009-11-10
CPC分类号： E05B17/0029 , E05C9/02 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/0964 , Y10T292/1021 , Y10T292/1038
摘要： In a pod used in an FIMS system, an engaged portion is provided on the outer surface of the lid of a pod. A through hole is provided in a flange portion that is provided around the pod opening and in which the lid is to be received. The through-hole allows access to the engaged portion from the external space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that it can slide in a direction parallel to the side wall of the flange. The engagement portion of the latch mechanism reaches the engaged portion through the aforementioned through-hole. Movement of the latch mechanism brings the engagement portion into an engaging state and a disengaged state.
摘要翻译： 在用于FIMS系统的荚中，在荚的盖的外表面上设置一个啮合部分。 在设置在容器开口周围的凸缘部分设有通孔，盖子将被容纳在该通孔中。 通孔允许从外部空间接合被接合部分。 闩锁机构以能够沿与凸缘的侧壁平行的方向滑动的方式支撑在凸缘部的荚体主体侧表面上。 闩锁机构的接合部分通过上述通孔到达接合部分。 闩锁机构的移动使接合部分进入接合状态和脱离状态。
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公开(公告)号：US08186927B2
公开(公告)日：2012-05-29
申请号：US12471987
申请日：2009-05-26
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , H01L21/67276
摘要： A transfer chamber is partitioned into a second chamber in which a transfer robot moving through an opening portion which can be opened/closed by a door is arranged, and a minute first chamber which serves as a FIMS system and includes a door capable of retaining a lid of a pod. The second chamber maintains a state in which an inert gas constantly circulates owing to minute nitrogen while having a pressure higher than that inside the first chamber. The first chamber is normally sealed while an oxide gas is suppressed in advance. In addition, at a time of transferring wafers, a partial pressure of the oxide gas is lowered with use of a downflow which is caused by the inert gas. Further, the first chamber and the second chamber are communicated with each other after a level of the partial pressure is confirmed with use of an oxygen level meter. As described above, an existing amount of the oxide gas is reduced in the so-called transfer chamber in semiconductor processing equipment in which the FIMS system is secured.
摘要翻译： 传送室被分隔成第二室，其中布置有移动通过可由门打开/关闭的开口部分的传送机器人，以及用作FIMS系统的微小的第一室，并且包括能够保持 荚的盖子 第二室保持这样的状态，其中惰性气体由于微小的氮气而不断地循环，同时压力高于第一室内的压力。 通常密封第一室，同时预先抑制氧化物气体。 此外，在转移晶片时，使用由惰性气体引起的向下流动，氧化物气体的分压降低。 此外，在使用氧水位计确认分压水平之后，第一室和第二室彼此连通。 如上所述，在确保FIMS系统的半导体加工设备中，在所谓的转移室中，氧化物气体的存在量减少。
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公开(公告)号：US20100133270A1
公开(公告)日：2010-06-03
申请号：US12624579
申请日：2009-11-24
IPC分类号： B65D51/00
CPC分类号： H01L21/67772 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/1021 , Y10T292/1038
摘要： The FIMS system is for use with a pod composed of a lid having an engaged portion provided on the outer surface thereof and a pod body having a latch mechanism including an engagement portion that engages the engaged portion as it moves along a predetermined axis to fix the lid to the pod. The FIMS system has a latch mechanism drive means for driving the latch mechanism along a certain axis and an engagement portion position sensor that can generate a signal indicating whether the engagement portion is at an engagement position or non-engagement position when the latch mechanism drive means drives the latch mechanism. The latch mechanism drive means and the engagement portion position sensor are provided in the vicinity of a first opening portion of the FIMS system.
摘要翻译： FIMS系统用于由盖子组成的盒盖，盖子具有设置在其外表面上的接合部分，以及盒体，其具有闩锁机构，该闩锁机构包括接合部分，该接合部分沿着预定轴线移动时与接合部分接合， 盖到荚。 FIMS系统具有用于沿着某个轴线驱动闩锁机构的闩锁机构驱动装置和接合部位置传感器，当闩锁机构驱动装置可以产生指示接合部分是否处于接合位置或非接合位置的信号 驱动闩锁机构。 闩锁机构驱动装置和接合部位置传感器设置在FIMS系统的第一开口部分附近。
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公开(公告)号：US20090297298A1
公开(公告)日：2009-12-03
申请号：US12471987
申请日：2009-05-26
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , H01L21/67276
摘要： A transfer chamber is partitioned into a second chamber in which a transfer robot moving through an opening portion which can be opened/closed by a door is arranged, and a minute first chamber which serves as a FIMS system and includes a door capable of retaining a lid of a pod. The second chamber maintains a state in which an inert gas constantly circulates owing to minute nitrogen while having a pressure higher than that inside the first chamber. The first chamber is normally sealed while an oxide gas is suppressed in advance. In addition, at a time of transferring wafers, a partial pressure of the oxide gas is lowered with use of a downflow which is caused by the inert gas. Further, the first chamber and the second chamber are communicated with each other after a level of the partial pressure is confirmed with use of an oxygen level meter. As described above, an existing amount of the oxide gas is reduced in the so-called transfer chamber in semiconductor processing equipment in which the FIMS system is secured.
摘要翻译： 传送室被分隔成第二室，其中布置有移动通过可由门打开/关闭的开口部分的传送机器人，以及用作FIMS系统的微小的第一室，并且包括能够保持 荚的盖子 第二室保持这样的状态，其中惰性气体由于微小的氮气而不断地循环，同时压力高于第一室内的压力。 通常密封第一室，同时预先抑制氧化物气体。 此外，在转移晶片时，使用由惰性气体引起的向下流动，氧化物气体的分压降低。 此外，在使用氧水位计确认分压水平之后，第一室和第二室彼此连通。 如上所述，在确保FIMS系统的半导体加工设备中，在所谓的转移室中，氧化物气体的存在量减少。
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