公开(公告)号：US20240301545A1

公开(公告)日：2024-09-12

申请号：US18429838

申请日：2024-02-01

Applicant: ULVAC, INC.

Inventor： Takahito Kimoto ,  Masashi Yasuda ,  Toshiharu Kurauchi ,  Shunsuke Sasaki ,  Yuusuke Ujihara

IPC: C23C14/26

CPC classification number: C23C14/26

Abstract: A vacuum evaporation method includes a vaporization step in which use is made of an evaporation boat including: a boat main body having a containing part of an evaporation material as an evaporation source; and electrode mounting plate parts respectively extending outward at both ends of the boat main body. A wire-shaped evaporation material is fed from above a bottom plate of the boat main body defining the containing part of the evaporation material, in a manner to come into contact with the bottom plate. Electric current is applied across both the electrode mounting plate parts in order to heat the boat main body, thereby evaporating the evaporation material inside the containing part. The vacuum evaporation method further includes a displacement step of continuously or intermittently displacing, while the wire-shaped evaporation material is being fed, a front end part of the wire-shaped evaporation material relative to the boat main body.

公开(公告)号：US20240279791A1

公开(公告)日：2024-08-22

申请号：US18537044

申请日：2023-12-12

Applicant: ULVAC, INC.

Inventor： Takahito Kimoto ,  Masashi Yasuda ,  Toshiharu Kurauchi ,  Shunsuke Sasaki

IPC: C23C14/26 ,  C23C14/24

CPC classification number: C23C14/26 ,  C23C14/243

Abstract: An evaporation source for use in a vacuum evaporation apparatus is provided with: an evaporation boat inclusive of a boat main body with a containing part for an evaporation material, and electrode mounting plate parts respectively extending outward from both ends of the boat main body; and material feeding means for feeding a wire-shaped evaporation material into the containing part from an upper side thereof. By charging electric current across both electrode mounting plate parts, the boat main body is heated to evaporate the evaporation material inside the containing part. A supporting means is disposed in contact, from underneath, with such a bottom plate part of the boat main body as defines the containing part. The supporting means has supporting plates disposed in a state in which upper ends of the supporting plates are in contact, from underneath, with the bottom plate part of the boat main body.

公开(公告)号：US20240279790A1

公开(公告)日：2024-08-22

申请号：US18537130

申请日：2023-12-12

Applicant: ULVAC, INC.

Inventor： Takahito Kimoto ,  Masashi Yasuda ,  Toshiharu Kurauchi ,  Shunsuke Sasaki

IPC: C23C14/24

CPC classification number: C23C14/243

Abstract: Provided is an evaporation source for use in a vacuum evaporation apparatus, the evaporation source restricting a local overheating and planning prolonged lifetime. The evaporation source includes: a boat main body having a containing part for the evaporation material; rising plate parts each rising upward from both ends as seen in one direction of the boat main body; and electrode mounting plate parts each extending outward from the respective upper ends of the rising plate parts. The boat main body is heated by applying electric power across both the electrode mounting plate parts, thereby causing the evaporation material inside the containing part to be evaporated. At this time, the rising plate parts are provided with dividing passages for the applied electric current.