公开(公告)号：US11295946B2

公开(公告)日：2022-04-05

申请号：US17375680

申请日：2021-07-14

Applicant: UNILAM CO., LTD.

Inventor： Joo Young Yoon ,  Young Duk Ha ,  Eun Sik Kim ,  Hong Chae Jung ,  So Ree Kim

IPC: H01J61/54 ,  H01J65/00

Abstract: A triple tube type excimer lamp according to an embodiment of the present invention includes a discharge unit which includes an outer tube having an external electrode on an outer circumferential surface thereof, an inner tube having the same axis as the outer tube, inserted into the outer tube, and having an internal electrode on an inner surface thereof, and one pair of assembly tubes respectively disposed on both sides of the inner tube, and configured to generate light by discharge, a cover tube having a shape surrounding an outer side of the outer tube; and one pair of bases respectively coupled with the one pair of assembly tubes and respectively sealed with both ends of the cover tube.