公开(公告)号：US20190384269A1

公开(公告)日：2019-12-19

申请号：US16008114

申请日：2018-06-14

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Ping YEN ,  Te-Sung HUNG ,  Ming-Kuan KAO ,  Ming-Feng WANG ,  Chieh-Ming CHIU ,  Chin-Hsin HUANG ,  Pin-Kuei LEE ,  Chia-Fan TSAI

IPC: G05B19/418 ,  G06Q10/08

Abstract: A device and a method for analyzing a manufacturing apparatus are provided. The device includes a storing unit, a detecting unit, a calculating unit and a determining unit. The storing unit is for storing a supply amount of material. The detecting unit is for continuously detecting the manufacturing apparatus once the material is used during whole of a process to obtain a total usage. The calculating unit is for calculating a usage ratio of the total usage to the supply amount. The determining unit is for determining whether the manufacturing apparatus is operated in a usage trouble operation according to the usage ratio.