公开(公告)号：US20230307207A1

公开(公告)日：2023-09-28

申请号：US18017575

申请日：2021-07-09

Applicant: UNIVERSITEIT ANTWERPEN ,  IMEC VZW

Inventor： Jan SIJBERS ,  Jan DE BEENHOUWER ,  Yu-Ting LING ,  Wilfried VANDERVORST

IPC: H01J37/26 ,  G01N23/046

CPC classification number: H01J37/26 ,  G01N23/046 ,  G01N2223/401

Abstract: A method for determining a three-dimensional atomic distribution of a sample having a tip, during an atom probe tomography process. The method accounts for the tip not being axial symmetric and not having a hemispherical shaped apex throughout the evaporation process.