公开(公告)号：US09245731B2

公开(公告)日：2016-01-26

申请号：US14680643

申请日：2015-04-07

Applicant: USHIO DENKI KABUSHIKI KAISHA

Inventor： Tadashi Inada ,  Kenji Yamamori

IPC: H01J7/26 ,  H01J61/52 ,  H05B41/36 ,  H05B41/24

CPC classification number: H01J61/526 ,  H01J65/046 ,  H05B41/24

Abstract: A light irradiating apparatus includes: an excimer lamp including a high voltage side electrode and a low voltage side electrode; a cooling mechanism configured to cool the high voltage side electrode using a cooling medium; and a leak current discharge circuit. The cooling mechanism includes a passage and a conductor, in which the passage allows the cooling medium to flow through, and the conductor is in contact with the cooling medium, and the conductor is electrically connected to the leak current discharge circuit.

Abstract translation: 光照射装置包括：准分子灯，包括高压侧电极和低压侧电极; 冷却机构，其构造为使用冷却介质冷却所述高压侧电极; 和泄漏电流放电电路。 冷却机构包括通道和导体，通道允许冷却介质流过，并且导体与冷却介质接触，并且导体电连接到泄漏电流放电电路。

公开(公告)号：US20150287586A1

公开(公告)日：2015-10-08

申请号：US14680643

申请日：2015-04-07

Applicant: USHIO DENKI KABUSHIKI KAISHA

Inventor： Tadashi Inada ,  Kenji Yamamori

IPC: H01J61/52 ,  H05B41/24 ,  H05B41/36

CPC classification number: H01J61/526 ,  H01J65/046 ,  H05B41/24

Abstract: A light irradiating apparatus includes: an excimer lamp including a high voltage side electrode and a low voltage side electrode; a cooling mechanism configured to cool the high voltage side electrode using a cooling medium; and a leak current discharge circuit. The cooling mechanism includes a passage and a conductor, in which the passage allows the cooling medium to flow through, and the conductor is in contact with the cooling medium, and the conductor is electrically connected to the leak current discharge circuit.

Abstract translation: 光照射装置包括：准分子灯，包括高压侧电极和低压侧电极; 冷却机构，其构造为使用冷却介质冷却所述高压侧电极; 和泄漏电流放电电路。 冷却机构包括通道和导体，通道允许冷却介质流过，并且导体与冷却介质接触，并且导体电连接到泄漏电流放电电路。