公开(公告)号：US08232728B2

公开(公告)日：2012-07-31

申请号：US11991493

申请日：2006-09-07

申请人： Udo Krohmann ,  Torsten Neumann ,  Joerg Ehlbeck ,  Kristian Rackow

发明人： Udo Krohmann ,  Torsten Neumann ,  Joerg Ehlbeck ,  Kristian Rackow

IPC分类号： H01J7/24

CPC分类号： H05H1/30

摘要： The invention relates to a method for igniting and generating an expanding diffuse microwave plasma and to a device for carrying out such a method. The method is particularly suited for generating microwave plasmas for the purpose of carrying out plasma treatment of surfaces and substances, particularly three-dimensional objects as well as particles under atmospheric pressure. The aim of the invention is to provide a method for igniting and generating these plasmas that is, particularly under normal and high pressure, easy and operationally safe as well as, in principle, carried out without a flow of gas. The invention also relates to a method and device for carrying out plasma treatment of surfaces and substances by means of such a plasma, which makes an effective plasma treatment possible due to its high stability with regard to plasma generation and maintenance, low gas consumption and a high plasma volume. To this end, a plasma ignition ensues inside a wave-bound hollow structure by means of microwave launching over a resonant igniting structure, a simultaneous impelling of the plasma through the resonant igniting structure, however, is not possible. The ignited plasma is supplied with energy via a surrounding microwave field so that an expanding diffuse plasma forms. A particular embodiment in a coaxial arrangement makes it possible to generate a plasma exiting the device for the purpose of carrying out mobile plasma treatment.

摘要翻译： 本发明涉及一种用于点燃和产生扩展的漫射微波等离子体的方法以及用于执行这种方法的装置。 该方法特别适用于产生微波等离子体，用于对大气压下的表面和物质，特别是三维物体以及颗粒进行等离子体处理。 本发明的目的是提供一种用于点燃和产生这些等离子体的方法，特别是在正常和高压下，容易和操作安全以及原则上在没有气流的情况下进行。 本发明还涉及通过这种等离子体进行表面和物质的等离子体处理的方法和装置，由于其在等离子体发生和维护方面的高稳定性，低气体消耗和 高等离子体体积。 为此，通过在谐振点火结构上的微波发射，通过谐振点火结构同时推动等离子体，等离子体点火在波浪中空结构内部发生，然而，是不可能的。 点燃的等离子体通过周围的微波场供给能量，从而形成扩散的漫射等离子体。 同轴布置中的特定实施例使得可以产生离开设备的等离子体，以进行移动等离子体处理。

公开(公告)号：US20100001647A1

公开(公告)日：2010-01-07

申请号：US11991493

申请日：2006-09-07

申请人： Udo Krohmann ,  Torsten Neumann ,  Joerg Ehlbeck ,  Kristian Rackow

发明人： Udo Krohmann ,  Torsten Neumann ,  Joerg Ehlbeck ,  Kristian Rackow

IPC分类号： H05H1/46

CPC分类号： H05H1/30

摘要： The invention relates to a method for igniting and generating an expanding diffuse microwave plasma and to a device for carrying out such a method. The method is particularly suited for generating microwave plasmas for the purpose of carrying out plasma treatment of surfaces and substances, particularly three-dimensional objects as well as particles under atmospheric pressure. The aim of the invention is to provide a method for igniting and generating these plasmas that is, particularly under normal and high pressure, easy and operationally safe as well as, in principle, carried out without a flow of gas. The invention also relates to a method and device for carrying out plasma treatment of surfaces and substances by means of such a plasma, which makes an effective plasma treatment possible due to its high stability with regard to plasma generation and maintenance, low gas consumption and a high plasma volume. To this end, a plasma ignition ensues inside a wave-bound hollow structure by means of microwave launching over a resonant igniting structure, a simultaneous impelling of the plasma through the resonant igniting structure, however, is not possible. The ignited plasma is supplied with energy via a surrounding microwave field so that an expanding diffuse plasma forms. A particular embodiment in a coaxial arrangement makes it possible to generate a plasma exiting the device for the purpose of carrying out mobile plasma treatment.

摘要翻译： 本发明涉及一种用于点燃和产生扩展的漫射微波等离子体的方法以及用于执行这种方法的装置。 该方法特别适用于产生微波等离子体，用于对大气压下的表面和物质，特别是三维物体以及颗粒进行等离子体处理。 本发明的目的是提供一种用于点燃和产生这些等离子体的方法，特别是在正常和高压下，容易和操作安全以及原则上在没有气流的情况下进行。 本发明还涉及通过这种等离子体进行表面和物质的等离子体处理的方法和装置，由于其在等离子体发生和维护方面的高稳定性，低气体消耗和 高等离子体体积。 为此，通过在谐振点火结构上的微波发射，通过谐振点火结构同时推动等离子体，等离子体点火在波浪中空结构内部发生，然而，是不可能的。 点燃的等离子体通过周围的微波场供给能量，从而形成扩散的漫射等离子体。 同轴布置中的特定实施例使得可以产生离开设备的等离子体，以进行移动等离子体处理。