METHODS AND SYSTEMS FOR SUBSTRATE FUNCTIONALIZATION

    公开(公告)号:US20240326090A1

    公开(公告)日:2024-10-03

    申请号:US18608317

    申请日:2024-03-18

    CPC classification number: B05D1/60 B05D1/32

    Abstract: Provided herein are systems and methods for functionalizing a substrate. The method may comprise providing a substrate surface, wherein the substrate surface comprises a plurality of individually addressable locations, and exposing the substrate surface to a dose of organosilane vapor to generate a plurality of organosilane-functionalized locations on the substrate surface, wherein the plurality of organosilane-functionalized locations corresponds to at least a subset of the plurality of individually addressable locations. The dose of organosilane vapor may be provided at relatively low dose, in an example, at most about 1×1024 molecules per m2.

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