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公开(公告)号:US20210119124A1
公开(公告)日:2021-04-22
申请号:US16687297
申请日:2019-11-18
Applicant: United Microelectronics Corp.
Inventor: WEN-JEN WANG , Chun-Hung Cheng , Chuan-Fu Wang
IPC: H01L45/00
Abstract: A memory device structure includes a substrate, a memory stacked structure, and a spacer. The memory stacked structure is formed on the substrate by stacking a first electrode layer, a memory material layer, and a second electrode layer. The memory material layer has a tilted sidewall, or the memory material layer and the first electrode layer have a tilted sidewall. The tilted sidewall is indented with respect to a sidewall of the second electrode layer. The spacer is disposed on the tilted sidewall.