公开(公告)号：US20180108865A1

公开(公告)日：2018-04-19

申请号：US15787117

申请日：2017-10-18

Applicant: Universal Display Corporation

Inventor： Siddharth HARIKRISHNA MOHAN ,  William E. QUINN ,  Arpit PATEL ,  James Robert KANTOR

IPC: H01L51/52 ,  H01L51/00 ,  H01L51/56

CPC classification number: H01L51/5256 ,  H01L51/0097 ,  H01L51/56 ,  H01L2251/5338 ,  H01L2251/558

Abstract: A hybrid permeation barrier having two complementary layers is disclosed. The barrier includes a first layer with a relatively high stress-thickness in the range of −1000 MPa-μm to −200 MPa-μm and a second layer with a relatively low stress-thickness in the range −150 MPa-μm to 300 MPa-μm. The second layer compensates for the stress caused by the first, thereby allowing for a barrier that provides good permeation without causing failure of the device due to delamination.