公开(公告)号：US11189456B2

公开(公告)日：2021-11-30

申请号：US16968396

申请日：2019-02-13

申请人： Universiteit Maastricht

发明人： Paul Van Schayck ,  Raimond Ravelli

IPC分类号： H01J37/24 ,  G01T1/29 ,  H01J37/244

摘要： A sample may be inspected by making particles traverse the sample. The particles that have traversed the sample hit a detector one-by-one. In response thereto, the detector provides a sequence of respective detection outputs. The sequence of respective detection outputs is processed so as to identify respective locations where respective incident particles have hit the detector. An image is generated on the basis of the respective locations that have been identified. In order to determine a location where an incident particle has hit the detector, an evaluation is made with regard to pre-established respective associations between, on the one hand, respective locations where incident particles have hit the detector and, on the other hand, respective detection outputs.