-
公开(公告)号:US20210074655A1
公开(公告)日:2021-03-11
申请号:US17011190
申请日:2020-09-03
IPC分类号: H01L23/00 , H01L29/788 , H01L21/265 , H01L29/66
摘要: A system and method for adding security to floating gate transistors (FGT), including applications for guarding integrated circuit (IC) chips against reverse engineering techniques, such as Scanning Capacitance Microscopy (SCM). By adding a processing step to the conventional FGT through adding an oppositely doped implanted layer to the substrate, the FGT state cannot be easily detected with SCM reverse engineering.