公开(公告)号：US10693393B2

公开(公告)日：2020-06-23

申请号：US15987564

申请日：2018-05-23

Applicant: University of Manitoba

Inventor： Cyrus Shafai ,  Yu Zhou

IPC: H02N1/06 ,  H02N1/00 ,  B81B3/00

Abstract: A new tri-electrode topology reduces the control voltage requirement for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force of the higher voltage drive electrode, whose voltage remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode's modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke.

公开(公告)号：US20190036463A1

公开(公告)日：2019-01-31

申请号：US15987564

申请日：2018-05-23

Applicant: University of Manitoba

Inventor： Cyrus Shafai ,  Yu Zhou

IPC: H02N1/00 ,  B81B3/00

Abstract: A new tri-electrode topology reduces the control voltage requirement for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force of the higher voltage drive electrode, whose voltage remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode's modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke.