公开(公告)号：US20230049650A1

公开(公告)日：2023-02-16

申请号：US17859894

申请日：2022-07-07

申请人： Ushio Denki Kabushiki Kaisha

发明人： Daiki Yamatani ,  Akihisa Nagano ,  Fuki Sato ,  Nobuaki Miyagawa

IPC分类号： G03F7/20

摘要： A storage and drainage mechanism includes a storage vessel, a drainage section, and a temperature controller. The storage vessel stores a stored material containing metal of plasma raw material at a temperature at which the stored material is in a liquid-phase state. The drainage section includes a drain pipe including an inlet through which the stored material flows in, and an outlet through which the stored material drains away, the drain pipe being communicated with an interior of the storage vessel, and a temperature control element that adjusts a temperature of the drain pipe. The temperature controller controls the temperature control element to switch the temperature of the drain pipe in a manner that the stored material in the drain pipe is in either a liquid-phase state or a solid-phase state.