公开(公告)号：US20100098853A1

公开(公告)日：2010-04-22

申请号：US12256421

申请日：2008-10-22

申请人： Uwe HOFFMANN ,  Marcel MARTINI ,  Florian RIES ,  Elisabeth SOMMER ,  Reiner GERTMANN

发明人： Uwe HOFFMANN ,  Marcel MARTINI ,  Florian RIES ,  Elisabeth SOMMER ,  Reiner GERTMANN

IPC分类号： C23C16/44 ,  C23C16/54

CPC分类号： C23C14/562 ,  C23C14/12 ,  H01L21/67109 ,  H01L21/67721 ,  H01L21/6776 ,  H01L51/001

摘要： The invention relates to an arrangement for the vaporization of materials, and specifically of organic materials, such as are utilized for example in the production of OLEDs. A heating element and a device for transporting a carrier for a layer to be vaporized are herein provided. The carrier with the layer to be vaporized is guided over the heating element where the layer is vaporized and deposited on a substrate.

摘要翻译： 本发明涉及一种用于材料蒸发的装置，特别涉及有机材料，例如用于制造OLED的装置。 此处提供加热元件和用于输送待蒸发层的载体的装置。 具有待蒸发层的载体被引导到加热元件上，其中层被蒸发并沉积在基底上。

公开(公告)号：US20120099949A1

公开(公告)日：2012-04-26

申请号：US12914113

申请日：2010-10-28

申请人： Reiner GERTMANN ,  Michael KÖNIG

发明人： Reiner GERTMANN ,  Michael KÖNIG

IPC分类号： H01L21/677

CPC分类号： H01L21/67769

摘要： An apparatus for supporting a plurality of carriers or substrates is described. The apparatus includes a vacuum chamber and a rotatable support for supporting the plurality of carriers or substrates, wherein the support is provided within the vacuum chamber and is configured for rotating the supported plurality of carriers or substrates around a rotation axis.

摘要翻译： 描述了用于支撑多个载体或基底的装置。 该装置包括真空室和用于支撑多个载体或基底的可旋转支撑件，其中所述支撑件设置在所述真空室内并且构造成用于围绕旋转轴线旋转被支撑的多个载体或基底。

公开(公告)号：US20190242011A1

公开(公告)日：2019-08-08

申请号：US16312122

申请日：2016-07-01

申请人： Reiner GERTMANN ,  Hans-Georg LOTZ ,  Applied Materials, Inc.

发明人： Reiner GERTMANN ,  Hans-Georg LOTZ

IPC分类号： C23C14/54 ,  C23C14/56

CPC分类号： C23C14/547 ,  C23C14/562

摘要： According to one aspect of the present disclosure, a processing system for processing a flexible substrate is provided. The processing system includes: a vacuum chamber; a transport system configured to guide the flexible substrate through the vacuum chamber along a substrate transportation path (P), wherein the transport system comprises a first substrate support and a second substrate support arranged at a distance from the first substrate support; and an inspection system for inspecting the flexible substrate. The inspection system includes: a light source configured to direct a light beam through a portion of the flexible substrate between the first substrate support and the second substrate support; and a light detector for detecting the light beam for conducting a transmission measurement of the flexible substrate, wherein at least one of the light source and the light detector is arranged in an environment configured for a second pressure level different from a first pressure level in the vacuum chamber. According to a further aspect, a deposition apparatus is provided. According to a further aspect, a method processing a flexible substrate is provided.