公开(公告)号：US20220103153A1

公开(公告)日：2022-03-31

申请号：US17548599

申请日：2021-12-13

申请人： VANGUARD INTERNATIONAL SEMICONDUCTOR SIGAPORE PTE. LTD.

发明人： You Qian ,  Humberto CAMPANELLA PINEDA ,  RAKESH KUMAR

IPC分类号： H03H9/02 ,  H03H9/13 ,  H03H9/17 ,  H03H3/02 ,  H01L41/29 ,  H01L41/31 ,  H03H9/54

摘要： Method of designing a BAW resonator and filter and the resulting devices are provided. Embodiments include patterning a bottom electrode of a resonator, patterning a top electrode of the resonator, and intersecting area of the resonator, wherein the effective area includes a closed-loop contour line including a pulse function pattern with predefined amplitude, period and a number of repetitions of pulses along the closed-loop contour line.