公开(公告)号：US20050139785A1

公开(公告)日：2005-06-30

申请号：US10747613

申请日：2003-12-30

申请人： Vadim Banine ,  Johannes De Kuster ,  Johannes Moors ,  Frank Schuurmans ,  Lucas Stevens

发明人： Vadim Banine ,  Johannes De Kuster ,  Johannes Moors ,  Frank Schuurmans ,  Lucas Stevens

IPC分类号： G03F7/20

CPC分类号： G03F7/70908 ,  G03F7/70916

摘要： A lithographic apparatus is disclosed. The lithographic apparatus includes a radiation source that produces EUV radiation, an illumination system that provides a beam of the EUV radiation produced by the radiation source, and a support structure that supports a patterning structure. The patterning structure is configured to impart the beam of radiation with a pattern in its cross-section. The apparatus also includes a substrate support that supports a substrate, and a projection system that projects the patterned beam onto a target portion of the substrate. The radiation source includes a debris-mitigation system that mitigates debris particles which are formed during production of EUV radiation. The debris-mitigation system is configured to provide additional particles for interacting with the debris particles.

摘要翻译： 公开了一种光刻设备。 光刻设备包括产生EUV辐射的辐射源，提供由辐射源产生的EUV辐射束的照明系统和支持图案形成结构的支撑结构。 图案形成结构被配置为在其横截面中赋予辐射束图案。 该装置还包括支撑基板的基板支撑件和将图案化的光束投影到基板的目标部分上的投影系统。 辐射源包括减轻在生成EUV辐射期间形成的碎片颗粒的碎片减轻系统。 碎片减轻系统被配置为提供用于与碎屑颗粒相互作用的附加颗粒。

公开(公告)号：US20070140910A1

公开(公告)日：2007-06-21

申请号：US11311623

申请日：2005-12-20

申请人： Vadim Banine ,  Levinus Bakker ,  Ralph Kurt ,  Johannes Moors ,  Lucas Stevens ,  Peter Zalm

发明人： Vadim Banine ,  Levinus Bakker ,  Ralph Kurt ,  Johannes Moors ,  Lucas Stevens ,  Peter Zalm

IPC分类号： G01N33/00

CPC分类号： G01N25/142 ,  G01N25/68 ,  Y10T436/25875

摘要： A system for detecting at least one contamination species in an interior space of a lithographic apparatus, including: at least one monitoring surface configured to be in contact with the interior space, a thermal controller configured to control the temperature of the monitoring surface to at least one detection temperature, and at least one detector configured to detect condensation of the at least one contamination species onto the monitoring surface.

摘要翻译： 一种用于检测光刻设备的内部空间中的至少一种污染物质的系统，包括：被配置为与所述内部空间接触的至少一个监测表面;被配置为将所述监测表面的温度控制在至少 一个检测温度，以及至少一个检测器，被配置为检测所述至少一种污染物质到所述监测表面上的冷凝。

公开(公告)号：US20070138414A1

公开(公告)日：2007-06-21

申请号：US11311624

申请日：2005-12-20

申请人： Lucas Stevens ,  Vadim Banine ,  Johannes Moors ,  Bastiaan Wolschrijn

发明人： Lucas Stevens ,  Vadim Banine ,  Johannes Moors ,  Bastiaan Wolschrijn

IPC分类号： G01J3/10

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G03F7/70916

摘要： A lithographic apparatus is disclosed. The apparatus includes a projection system configured to project a first radiation beam onto a target portion of a substrate, and at least one monitoring device for detecting contamination in a interior space. The monitoring device includes at least one dummy element having at least one contamination receiving surface. In an aspect of the invention, there is provided at least one dummy element which does not take part in transferring a radiation beam onto a target portion of a substrate, wherein it is monitored whether a contamination receiving surface of the dummy element has been contaminated.

摘要翻译： 公开了一种光刻设备。 该装置包括被配置为将第一辐射束投射到基板的目标部分上的投影系统，以及用于检测内部空间中的污染的至少一个监视装置。 监测装置包括至少一个具有至少一个污染物接收表面的虚拟元件。 在本发明的一个方面中，提供了至少一个虚拟元件，其不参与将辐射束传送到基板的目标部分上，其中监视虚设元件的污染物接收表面是否已被污染。

公开(公告)号：US20060247130A1

公开(公告)日：2006-11-02

申请号：US10543702

申请日：2004-01-27

申请人： Wilhelmus Van Der Krieken ,  Cornelis Kok ,  Lucas Stevens

发明人： Wilhelmus Van Der Krieken ,  Cornelis Kok ,  Lucas Stevens

IPC分类号： A01N43/02 ,  A01N37/18 ,  A01N25/00

CPC分类号： C09K17/52 ,  A01N41/04 ,  A01N59/16 ,  A01N65/00 ,  A01N59/20 ,  A01N43/90 ,  A01N43/80 ,  A01N43/40 ,  A01N37/10 ,  A01N37/02 ,  A01N31/08 ,  A01N59/06 ,  A01N61/00 ,  A01N35/08 ,  A01N2300/00 ,  A01N25/32 ,  A01N39/04 ,  A01N57/20 ,  A01N65/22 ,  A01N65/28

摘要： The invention relates to a composition for protecting an agricultural crop against external threats, such as weeds, pathogens, abiotic and biotic stresses and/or for improving the quality of the products produced by the crop, which composition comprises one or more poly-phenols and one or more other active ingredients. The other active ingredients may be natural crop protection compounds, metals, acids, all three optionally combined with each other and/or chemical. antimicrobial agents, or may be small particles of organic material, in particular of fibrous organic material, compounds that induce stress tolerance, compounds that stimulate wound repair and growth, or cellulose containing materials.

摘要翻译： 本发明涉及一种用于保护农作物免受诸如杂草，病原体，非生物和生物胁迫等外部威胁和/或改善由作物产生的产品的质量的组合物，该组合物包含一种或多种多酚和 一种或多种其它活性成分。 其他活性成分可以是天然作物保护化合物，金属，酸，三者任选地彼此结合和/或化学。 或者可以是有机材料的小颗粒，特别是纤维状有机材料的微粒，诱导应力耐受性的化合物，刺激伤口修复和生长的化合物，或含有纤维素的材料。