Method and apparatus for determining density of metal-inclusive components
    2.
    发明申请
    Method and apparatus for determining density of metal-inclusive components 审中-公开
    用于确定含金属成分的密度的方法和装置

    公开(公告)号:US20070128756A1

    公开(公告)日:2007-06-07

    申请号:US11296113

    申请日:2005-12-07

    IPC分类号: H01L21/00 H01L29/82 H01L21/22

    CPC分类号: G01N27/72

    摘要: A density evaluator for a metal-inclusive component includes a simulator and a meter. The simulator includes a receiving portion for receiving at least a portion of a metal-inclusive component. The meter is operatively connected with the simulator. The meter obtains an inductance value associated with the metal-inclusive component and the inductance value is used to determine a density value. A method and system for evaluating a density of a metal-inclusive component is also disclosed.

    摘要翻译: 用于包含金属的组件的密度评估器包括模拟器和仪表。 模拟器包括用于接收包含金属的组件的至少一部分的接收部分。 仪表与模拟器可操作地连接。 仪表获得与含金属元件相关联的电感值,电感值用于确定密度值。 还公开了一种用于评价含金属成分的密度的方法和系统。