公开(公告)号：US20150026953A1

公开(公告)日：2015-01-29

申请号：US14323088

申请日：2014-07-03

申请人： Varian Semiconductor Equipment Associates, Inc.

发明人： Aaron P. Webb ,  Charles T. Carlson ,  Michael Honan ,  Luigi G. Amato ,  Christopher Neil Grant ,  James D. Strassner

IPC分类号： H01L21/68 ,  B05B15/04

CPC分类号： H01L21/682 ,  C23C14/04 ,  Y10T29/49895

摘要： A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.

摘要翻译： 多个掩模附着到荫罩框架的下侧。 该附件被制成使得每个掩模可以在三个方向上相对于掩模框架独立地移动。 该相对移动允许每个掩模调整其位置以与设置在工作表面上的相应对准销对准。 在一个实施例中，每个掩模使用紧固件附接到掩模框架，其中紧固件具有直径小于设置在掩模上的安装孔的直径的轴。 可以使用偏置元件来允许掩模和掩模框架在垂直方向上的相对移动。 每个掩模还可以具有与工作表面上的相应对准销匹配的运动特征。

公开(公告)号：US09490153B2

公开(公告)日：2016-11-08

申请号：US14323088

申请日：2014-07-03

申请人： Varian Semiconductor Equipment Associates, Inc.

发明人： Aaron P. Webb ,  Charles T. Carlson ,  Michael Honan ,  Luigi G. Amato ,  Christopher Neil Grant ,  James D. Strassner

IPC分类号： C23C14/04 ,  H01L21/68

CPC分类号： H01L21/682 ,  C23C14/04 ,  Y10T29/49895

摘要： A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.

摘要翻译： 多个掩模附着到荫罩框架的下侧。 该附件被制成使得每个掩模可以在三个方向上相对于掩模框架独立地移动。 该相对移动允许每个掩模调整其位置以与设置在工作表面上的相应对准销对准。 在一个实施例中，每个掩模使用紧固件附接到掩模框架，其中紧固件具有直径小于设置在掩模上的安装孔的直径的轴。 可以使用偏置元件来允许掩模和掩模框架在垂直方向上的相对移动。 每个掩模还可以具有与工作表面上的相应对准销匹配的运动特征。