公开(公告)号：US20030110844A1

公开(公告)日：2003-06-19

申请号：US10006085

申请日：2001-12-06

申请人： Veeco Instruments Inc.

发明人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

IPC分类号： H02N002/04 ,  G01B007/34

CPC分类号： G01Q10/065 ,  G01Q60/42 ,  Y10S977/837 ,  Y10S977/85 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/872 ,  Y10S977/881

摘要： A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.

摘要翻译： 强力扫描探针显微镜（FSPM）和对样品进行力测量的相关方法包括具有支撑样品以使样品沿三个正交方向移动的表面的压电扫描器。 FSPM还包括位移传感器，其测量样品在与表面正交的方向上的运动，并产生相应的位置信号，以便提供闭环位置反馈。 此外，相对于压电扫描器固定探针，而使用偏转检测装置来感测探针的偏转。 FSPM还包括基于位置信号产生扫描器驱动信号的控制器，并且适于根据在数据采集期间可以改变力曲线测量参数的用户定义的输入进行操作。