公开(公告)号：US20160067663A1

公开(公告)日：2016-03-10

申请号：US14782855

申请日：2014-03-19

Applicant: WACKER CHEMIE AG

Inventor： Friedrich POPP ,  Christian KUTZA ,  Martin ROECKL ,  Tobias WEISS

IPC: B01J4/00 ,  B05B1/20 ,  C01B33/035

Abstract: A gas distribution system for a polysilicon deposition reactor eliminates or mitigates the problems associated with prior art distribution systems employs at least two segments which are gas-tightly connected to one another by readily detachable fasteners, with at least one gas inlet opening and one gas outlet opening, the gas distributor of the system being mounted by readily detachable fasteners to the polysilicon reactor.

Abstract translation: 用于多晶硅沉积反应器的气体分配系统消除或减轻与现有技术分配系统相关的问题，采用通过易拆卸的紧固件彼此气密地连接的至少两个段，其中至少一个气体入口和一个气体出口 系统的气体分配器通过容易拆卸的紧固件安装到多晶硅反应器。