公开(公告)号：US20130129934A1

公开(公告)日：2013-05-23

申请号：US13300495

申请日：2011-11-18

申请人： WEI-CHING CHUANG

发明人： WEI-CHING CHUANG

IPC分类号： C08J7/04

CPC分类号： G02B6/13 ,  G02B6/12007 ,  G02B6/1221 ,  G02B6/124

摘要： The present invention discloses a method for fabricating polymeric wavelength filter based on an asymmetric Bragg coupler with single-grating waveguide. The asymmetric waveguide coupler is formed firstly on a negative photo-resist mold. PDMS film is injected into the narrow waveguide of the coupler to act as a protection layer. The gratings pattern is exposed on the alternative waveguide and subsequently transferred to PDMS stamp mold. The PDMS stamp mold is used as a stamp to transfer the gratings pattern of the ABC wavelength filter onto UV cured polymer to form the final ABC filter. Whereby, the fabrication process is reliable and accurate, and can offer great potential for mass production of the ABC filter with single-grating waveguide.

摘要翻译： 本发明公开了一种基于具有单光栅波导的不对称布拉格耦合器制造聚合物波长滤波器的方法。 不对称波导耦合器首先在负光致抗蚀模具上形成。 将PDMS膜注入到耦合器的窄波导中以用作保护层。 光栅图案暴露在替代波导上，随后转移到PDMS印模。 PDMS印模用作印模，以将ABC波长滤光片的光栅图案转印到UV固化的聚合物上，形成最终的ABC滤光片。 因此，制造工艺可靠准确，可以为单光栅波导的ABC滤波器批量生产提供巨大的潜力。