公开(公告)号：US3740561A

公开(公告)日：1973-06-19

申请号：US3740561D

申请日：1971-05-05

Applicant: WESTON INSTRUMENTS INC

Inventor： FLECK H ,  ROME M ,  WIXTED J

IPC: C03B23/207 ,  C03B37/028 ,  C03B37/15 ,  H01J9/12 ,  G01J1/20 ,  G01N21/30

CPC classification number: C03B23/207 ,  C03B37/028 ,  C03B37/15 ,  H01J9/125 ,  H01J2201/32

Abstract: An illustrative embodiment of the invention is directed to method and apparatus for manufacturing microchannel devices. Typically, the individual glass tubes in a hexagonal bundle are sealed on one end to individual hangers from which they are suspended vertically in a furnace. A vacuum is drawn within the furnace so that the inner surfaces of the tubes, exposed to atmospheric pressure, will not collapse during heating and drawing. At temperature, the bundle is drawn and elongates under the controlled forces applied through a modified Atwood''s machine to reduce the bundle cross section by a ratio of about 50 to 1. The elongated bundle is cut into lengths as it is drawn, and these individual lengths are stacked together within a tube of glass that has a higher melting point than the glass in the drawn lengths. The channels are once more sealed and the assemblies are subjected to a secondary fusion process prior to slicing into thin discs. The annular glass rings are removed from the discs and the microstructures are placed in a molten wax bath in order to fill the channels with wax before grinding and polishing. After grinding and polishing, the wax is removed.

Abstract translation: 本发明的说明性实施例涉及用于制造微通道装置的方法和装置。 通常，六边形束中的单个玻璃管的一端被密封到单独的悬挂器，它们从它们垂直悬挂在炉中。 在炉内抽真空，使得暴露于大气压力下的管的内表面在加热和拉伸过程中不会塌陷。 在温度下，束被拉伸并在通过改进的阿特伍德机器施加的受控力下伸长，以将束横截面减小大约50比1。细长的束在被拉伸时被切成长度，并且这些单独的长度 在玻璃管中堆叠在一起，其具有比拉伸长度的玻璃更高的熔点。