公开(公告)号：US3622291A

公开(公告)日：1971-11-23

申请号：US3622291D

申请日：1969-06-03

Applicant: WESTON INSTRUMENTS INC

Inventor： FLECK HORST G ,  ROME MARTIN ,  WIXTED JOSEPH M

IPC: C03B23/207 ,  C03B37/028 ,  C03B37/15 ,  H01J9/12 ,  C03B21/00

CPC classification number: H01J9/125 ,  C03B23/207 ,  C03B37/028 ,  C03B37/15 ,  H01J2201/32

Abstract: An illustrative embodiment of the invention is directed to method and apparatus for manufacturing microchannel devices. Typically, the individual glass tubes in a hexagonal bundle are sealed on one end to individual hangers from which they are suspended vertically in a furnace. A vacuum is drawn within the furnace so that the inner surfaces of the tubes, exposed to atmospheric pressure, will not collapse during heating and drawing. At temperature, the bundle is drawn and elongates under the controlled forces applied through a modified Atwood''s machine to reduce the bundle cross section by a ratio of about 50 to 1. The elongated bundle is cut into lengths as it is drawn, and these individual lengths are stacked together within a tube of glass that has a higher melting point than the glass in the drawn lengths. The channels are once more sealed and the assemblies are subjected to a secondary fusion process prior to slicing into thin discs. The annular glass rings are removed from the discs and the microstructures are placed in a molten wax bath in order to fill the channels with wax before grinding and polishing. After grinding and polishing, the wax is removed.