公开(公告)号：US06751850B2

公开(公告)日：2004-06-22

申请号：US10006224

申请日：2001-12-10

申请人： Wen-Ken Hu ,  Hsiao-Ping Hsieh ,  Zhi-Zhao Tai ,  Mark Wang

发明人： Wen-Ken Hu ,  Hsiao-Ping Hsieh ,  Zhi-Zhao Tai ,  Mark Wang

IPC分类号： B23P1900

CPC分类号： H01J37/3447 ,  C23C14/34 ,  C23C14/564 ,  Y10T29/53 ,  Y10T29/53961

摘要： An assembly station for a sputter shield assembly provides a work bench for assembling and disassembling the sputter shield assembly. The shield assembly has a clamp shield facing downwards to hold the shield assembly which is turned over by 180 degrees, and includes at least three bottom rim support arms for supporting the clamp shield and bearing the weight of the shield assembly, and at least three inner rim retaining arms for contacting the inner rim formed by the shield and the clamp shield. The invention provides a changed support means for holding the shield assembly on the assembly station so that one person is enough to do the assembly and disassembly of the shield assembly, and thus save manpower and operation time.

摘要翻译： 用于溅射屏蔽组件的装配站提供用于组装和拆卸溅射屏蔽组件的工作台。 屏蔽组件具有面向下的夹持屏蔽件，以将屏蔽组件保持180度，并且包括至少三个底部边缘支撑臂，用于支撑夹具屏蔽并承载屏蔽组件的重量，并且至少三个内部 用于接触由护罩和夹具护罩形成的内缘的轮辋保持臂。 本发明提供了一种用于将屏蔽组件保持在组装工位上的改变的支撑装置，使得一个人足以进行屏蔽组件的组装和拆卸，从而节省人力和操作时间。

公开(公告)号：US06658716B2

公开(公告)日：2003-12-09

申请号：US10106676

申请日：2002-03-25

申请人： Zhi-Zhao Tai ,  Wen-Kan Hu ,  Ching-Shun Fan ,  Li-Chun Liang

发明人： Zhi-Zhao Tai ,  Wen-Kan Hu ,  Ching-Shun Fan ,  Li-Chun Liang

IPC分类号： B23Q300

CPC分类号： H01L21/6875 ,  H01L21/68785 ,  Y10T29/49895 ,  Y10T29/49947 ,  Y10T29/49963

摘要： The present invention provides an auxiliary tool for assembling a motor assembly to a wafer-deposition machine for supporting a wafer. The auxiliary tool facilitates easy and quick assembly of the motor assembly to the wafer-deposition machine. An aspect of the present invention is directed to an auxiliary tool for assembling a motor assembly to a wafer-deposition machine, wherein the motor assembly includes a plurality of first screw holes and the wafer-deposition machine includes a plurality of second screw holes corresponding to the first screw holes, respectively. The auxiliary tool comprises a plurality of locking members each having a substantially uniform dimension in a longitudinal direction and being configured to be inserted through one of the plurality of first screw holes of the motor assembly with a corresponding one of the plurality of second screw holes of the wafer-deposition machine to align the first screw hole with the corresponding second screw hole. The auxiliary tool further comprises a plurality of supporting members. At least one supporting member is releasably coupled to each of the plurality of locking members to support the motor assembly with respect to the wafer-deposition machine to keep the locking member inserted through the first screw hole and the corresponding second screw hole and to maintain alignment of the first screw hole and the corresponding second screw hole.

摘要翻译： 本发明提供了一种用于将电动机组件组装到用于支撑晶片的晶片沉积机的辅助工具。 辅助工具有助于将电机组件容易且快速地组装到晶片沉积机器上。 本发明的一个方面涉及一种用于将电动机组件组装到晶片沉积机的辅助工具，其中电动机组件包括多个第一螺钉孔，并且晶片沉积机器包括多个对应于 第一个螺丝孔。 辅助工具包括多个锁定构件，每个锁定构件在纵向方向上具有基本上均匀的尺寸，并且构造成通过马达组件的多个第一螺钉孔中的一个插入，并将多个第二螺钉孔 晶片沉积机将第一螺纹孔与相应的第二螺孔对准。 辅助工具还包括多个支撑构件。 至少一个支撑构件可释放地联接到多个锁定构件中的每一个上，以相对于晶片沉积机器支撑马达组件，以保持锁定构件插入通过第一螺钉孔和对应的第二螺钉孔并保持对准 的第一螺丝孔和相应的第二螺丝孔。