公开(公告)号：US4530030A

公开(公告)日：1985-07-16

申请号：US564212

申请日：1983-12-22

申请人： Wolfgang Woest ,  Rainer Silbermann ,  Frank Hegner

发明人： Wolfgang Woest ,  Rainer Silbermann ,  Frank Hegner

IPC分类号： G01N25/64 ,  G01N27/22 ,  H01G5/20

CPC分类号： G01N27/225 ,  Y10T29/435 ,  Y10T29/49169

摘要： A thin-film humidity sensor for measuring the absolute humidity having a base electrode, a moisture-sensitive dielectric layer and a top electrode is formed at the end face of an electrically insulating bushing body by the thin-film technique. The connecting conductors are led through the bushing body and terminate in contact areas which are ground plane and polished together with the end face of the bushing body. The metal layers forming the electrodes are so shaped on application, preferably by means of perforated masks, that they each cover the contact area of the associated connecting conductor and are electrically connected thereto. The bushing body is inserted into a sleeve of a highly alloyed nickel-molybdenum compound and connected thereto in pressure-resistant manner.

摘要翻译： 通过薄膜技术在电绝缘衬套主体的端面处形成用于测量具有基极，湿敏介电层和顶电极的绝对湿度的薄膜湿度传感器。 连接导体被引导穿过衬套主体并且终止于接地面并且与衬套主体的端面一起抛光的接触区域中。 形成电极的金属层在施加时是优选的，通过多孔掩模来形成，它们各自覆盖相关联的连接导体的接触区域并与之电连接。 衬套主体被插入到高度合金化的镍 - 钼化合物的套筒中并且以耐压的方式与其连接。

公开(公告)号：US4603455A

公开(公告)日：1986-08-05

申请号：US724913

申请日：1985-04-19

申请人： Wolfgang Woest ,  Rainer Silbermann ,  Frank Hegner

发明人： Wolfgang Woest ,  Rainer Silbermann ,  Frank Hegner

IPC分类号： G01N25/64 ,  G01N27/22 ,  H01G4/06

CPC分类号： G01N27/225 ,  Y10T29/435 ,  Y10T29/49169

摘要： A thin-film humidity sensor for measuring the absolute humidity having a base electrode, a moisture-sensitive dielectric layer and a top electrode is formed at the end face of an electrically insulating bushing body by the thin-film technique. The connecting conductors are led through the bushing body and terminate in contact areas which are ground plane and polished together with the end face of the bushing body. The metal layers forming the electrodes are so shaped on application, preferably by means of perforated masks, that they each cover the contact area of the associated connecting conductor and are electrically connected thereto. The bushing body is inserted into a sleeve of a highly alloyed nickel-molybdenum compound and connected thereto in pressure-resistant manner.

摘要翻译： 通过薄膜技术在电绝缘衬套主体的端面处形成用于测量具有基极，湿敏介电层和顶电极的绝对湿度的薄膜湿度传感器。 连接导体被引导穿过衬套主体并且终止于接地面并且与衬套主体的端面一起抛光的接触区域中。 形成电极的金属层在施加时是优选的，通过多孔掩模来形成，它们各自覆盖相关联的连接导体的接触区域并与之电连接。 衬套主体被插入到高度合金化的镍 - 钼化合物的套筒中并且以耐压的方式与其连接。