DERIVING FOUNDRY FABRICATION MODELS FROM PERFORMANCE MEASUREMENTS OF FABRICATED DEVICES

    公开(公告)号:US20230185987A1

    公开(公告)日:2023-06-15

    申请号:US17551514

    申请日:2021-12-15

    CPC classification number: G06F30/20

    Abstract: In some embodiments, a non-transitory computer-readable medium is provided. The computer-readable medium has logic stored thereon that, in response to execution by one or more processors of a computing system, cause the computing system to perform actions for deriving a fabrication model for a fabrication system using an inverse design process. The actions include determining a test design for a test physical device, measuring performance of an instance of the test physical device fabricated by the fabrication system using the test design to determine an as-fabricated performance metric, optimizing the test design using a first loss function based on differences in a simulated performance metric of the test design and the as-fabricated performance metric to determine an as-fabricated design, and optimizing a fabrication model using a second loss function based on differences between the test design and the as-fabricated design.

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