公开(公告)号：US20020067533A1

公开(公告)日：2002-06-06

申请号：US09731339

申请日：2000-12-06

Applicant: XEROX CORPORATION

Inventor： Decai Sun ,  Michel A. Rosa ,  Chingwen Yeh

IPC: G02B026/08

CPC classification number: G06K7/10702 ,  G02B26/0841 ,  G02B26/105 ,  G06K7/10653 ,  Y10S359/904

Abstract: A micro-optical-electrical-mechanical laser scanner is configured from a silicon-on-insulator substrate having a silicon substrate layer, a buried oxide layer, and a single crystal silicon device layer. A first device layer portion having a micro-mirror fabricated therefrom. A laser is connected to a second device layer portion, and a hinge connects the first device layer portion and the second device layer portion. The hinge is formed with a bimorph material, wherein the bimorph material creates built-in stresses in the hinge. The bimorph hinge moves the released micro-mirror out of the horizontal plane to a position for either directly or indirectly reflecting laser light emitted from the laser.

Abstract translation: 微电子机电激光扫描器由具有硅衬底层，掩埋氧化物层和单晶硅器件层的绝缘体上硅衬底构成。 具有由其制造的微反射镜的第一器件层部分。 激光器连接到第二器件层部分，并且铰链连接第一器件层部分和第二器件层部分。 铰链由双压电晶片材料形成，其中双压电晶片材料在铰链中产生内在的应力。 双压电晶片铰链将释放的微镜从水平面移动到直接或间接反射从激光发射的激光的位置。