公开(公告)号：US20230243740A1

公开(公告)日：2023-08-03

申请号：US17885230

申请日：2022-08-10

Applicant: XI’AN JIAOTONG UNIVERSITY

Inventor： Mingzhe RONG ,  Jiaqi LIU ,  Feilong ZHANG ,  Wei KE ,  Minyuan CHEN ,  Huan YUAN ,  Aijun YANG ,  Dingxin LIU ,  Xiaohua WANG

IPC: G01N21/25 ,  G01N21/39

CPC classification number: G01N21/255 ,  G01N21/39

Abstract: Disclosed are an online vacuum degree detection system and method based on single-fiber laser-induced breakdown spectroscopy. In the system, a laser device generates laser that excites the laser through fiber induced breakdown spectroscopy; a fiber coupler couples and injects the laser; a single fiber is connected to the fiber coupler to transmit the laser; one end of an LIBS probe is connected to the single fiber, and the other end of the LIBS probe extends into a vacuum arc-extinguishing chamber; the laser is induced by the LIBS probe to generate plasma, and the plasma is subjected to self-emission imaging and enters the fiber coupler via the LIBS probe; a dichroscope is arranged on the fiber coupler to separate the laser from the plasma; a processor is connected to a camera and a spectrometer.