公开(公告)号：US20110153061A1

公开(公告)日：2011-06-23

申请号：US12643929

申请日：2009-12-21

申请人： YI CHUN TAN ,  HUAT SENG KHOR ,  EANG KEONG TAN ,  CHUN BENG ANG ,  CHAY HOON TANG

发明人： YI CHUN TAN ,  HUAT SENG KHOR ,  EANG KEONG TAN ,  CHUN BENG ANG ,  CHAY HOON TANG

IPC分类号： G06F7/00 ,  G11B17/04

CPC分类号： G11B5/851 ,  G11B7/266 ,  G11B17/22

摘要： A disk carrier for teaching disk positioning in a substrate changing system. The disk carrier composed of a panel having a disk opening configured to receive a disk and a plurality of beam sensors disposed around the disk opening to project beams parallel to a surface of the disk when secured within the disk opening. The plurality of beam sensors may be composed of at least one beam sensor on each of a front side and rear side of the panel.

摘要翻译： 用于在基板更换系统中教导盘定位的盘载体。 由具有构造成接收盘的盘开口的面板和围绕盘开口设置的多个光束传感器构成的盘载体，以在固定在盘开口内时平行于盘表面突出的光束。 多个光束传感器可以由面板的前侧和后侧中的每一个上的至少一个光束传感器构成。