公开(公告)号：US20130035224A1

公开(公告)日：2013-02-07

申请号：US13237213

申请日：2011-09-20

申请人： Yang-Kuao Kuo ,  Chia-Yi Hsiang ,  Bi-Jheng Chang ,  Fu-Hsing Huang

发明人： Yang-Kuao Kuo ,  Chia-Yi Hsiang ,  Bi-Jheng Chang ,  Fu-Hsing Huang

IPC分类号： C04B35/581 ,  C04B35/63 ,  C04B35/64

CPC分类号： C04B35/581 ,  C04B35/6267 ,  C04B35/62695 ,  C04B2235/3217 ,  C04B2235/3826 ,  C04B2235/427 ,  C04B2235/6583

摘要： Disclosed is a method for making an aluminum nitride substrate. At first, aluminum nitride is mixed with a carbonized material. The mixture is made into mixture powder in a granulation process. The mixture powder is sintered at an appropriate temperature so that the carbonized material reacts with oxygen to produce a gaseous carbon compound. The gaseous carbon compound is released, and hence an aluminum nitride substrate is made. Before the making of the aluminum nitride substrate is made, the aluminum nitride powder is mixed with the carbonized material. For the stable heat dispersion of the carbonized material, the heating is even during the sintering. The purity of the aluminum nitride substrate is high, the quality of the aluminum nitride substrate is good, and the size of the aluminum nitride substrate is large. Hence, the yield of the making of the aluminum nitride substrate is high.

摘要翻译： 公开了一种制造氮化铝衬底的方法。 首先，将氮化铝与碳化材料混合。 将混合物在造粒过程中制成混合物粉末。 混合物粉末在合适的温度下烧结，使得碳化材料与氧气反应产生气态碳化合物。 气态碳化合物被释放，因此制成氮化铝衬底。 在制造氮化铝衬底之前，将氮化铝粉末与碳化材料混合。 为了碳化材料的稳定的热分散，在烧结期间加热均匀。 氮化铝衬底的纯度高，氮化铝衬底的质量好，氮化铝衬底的尺寸大。 因此，氮化铝基板的制造成品率高。