公开(公告)号：US20080047341A1

公开(公告)日：2008-02-28

申请号：US11781569

申请日：2007-07-23

申请人： Yasuhiro KANAMARU ,  Keiji Hanzawa

发明人： Yasuhiro KANAMARU ,  Keiji Hanzawa

IPC分类号： G01F1/692

CPC分类号： G01F1/6845 ,  G01F1/688 ,  G01F15/006

摘要： An object of the invention is to realize a thermal gas flow sensor capable of reducing time fluctuation of a heating resistor. A heating resistor 3 and thermometric resistors 4 and 14 are formed on a surface of a thin-wall portion 2. Electrode drawn wires 18 to 23 and pad portions 8 to 13 are formed so as to draw signal lines from the heating resistor 3 and the thermometric resistors 4 and 14. Contact portions 24 to 29 are formed to come in contact with the heating resistor 3, the thermometric resistors 4 and 14, and the electrode drawn wires 18 to 23. The heating resistor 3 and the thermometric resistors 4 and 14 are covered with protective films 30a, 30b, and 31a and insulating films 31b and 30c. The protective films 31a and 31b are formed of a dense film formed of nitride or the like. A part coming in contact with a drawn wire portion 34 and the heating resistor 3 is covered with a contact barrier metal film 36 (titanium-based electrical conductor such as titanium nitride, titanium tungsten, and titanium). The titanium-based electrical conductor is a dense film and resistant to hydrogen. Therefore, it is possible to reduce a time fluctuation of the heating resistor.

摘要翻译： 本发明的目的是实现能够减少加热电阻器的时间波动的热气流量传感器。 在薄壁部分2的表面上形成一个加热电阻器3和测温电阻器4和14。 形成电极拉丝18〜23以及焊盘部8〜13，从加热电阻体3和测温电阻体4,14取出信号线。 形成接触部分24至29与加热电阻器3，测温电阻器4和14以及电极拉丝18至23接触。 加热电阻器3和温度测量电阻器4和14被保护膜30a，30b和31a以及绝缘膜31b和30c覆盖。 保护膜31a和31b由氮化物等形成的致密膜形成。 与拉丝部分34和加热电阻器3接触的部分被接触阻挡金属膜36（钛基电导体，例如氮化钛，钛钨和钛）覆盖。 钛基电导体是致密膜并且耐氢。 因此，可以减少加热电阻器的时间波动。