ETCHING METHOD AND ETCHING COMPOSITION USEFUL FOR THE METHOD
    1.
    发明申请
    ETCHING METHOD AND ETCHING COMPOSITION USEFUL FOR THE METHOD 审中-公开
    蚀刻方法和蚀刻组合物用于该方法

    公开(公告)号:US20080203060A1

    公开(公告)日:2008-08-28

    申请号:US12039050

    申请日:2008-02-28

    IPC分类号: C23F1/00 C23F1/10

    CPC分类号: H01L21/31111

    摘要: In etching of silicon nitride with a phosphorus type, if etching is carried for a long time, silicon oxide tends to precipitate, and it has been impossible to constantly carry out the etching for a long period of time.By an etching method for silicon nitride using a composition comprising a phosphorus compound, a boron compound, a silicon compound and/or their fluorides thereof, there will be no precipitation of silicon oxide even when the composition is used for a long time. It is particularly preferred to further add nitric acid and/or a nitrate, whereby stability of selectivity will be increased.

    摘要翻译: 在蚀刻具有磷的氮化硅的情况下,如果长时间地进行蚀刻,则氧化硅容易析出,长时间不能长时间地进行蚀刻。 通过使用包含磷化合物,硼化合物,硅化合物和/或其氟化物的组合物的氮化硅的蚀刻方法,即使长时间使用该组合物,也不会发生氧化硅的沉淀。 特别优选进一步加入硝酸和/或硝酸盐,从而提高选择性的稳定性。

    LUBRICANT SEALING STRUCTURE FOR GEAR COUPLING
    2.
    发明申请
    LUBRICANT SEALING STRUCTURE FOR GEAR COUPLING 有权
    用于齿轮联轴器的润滑剂密封结构

    公开(公告)号:US20120274033A1

    公开(公告)日:2012-11-01

    申请号:US13094289

    申请日:2011-04-26

    IPC分类号: F16J15/02

    CPC分类号: F16J15/52

    摘要: Disclosed is a lubricant sealing structure for a gear coupling, which can firmly prevent the leaking of the lubricant due to vibration or the like in the axial and radial directions inside the gear coupling. A sealing member is a cloth-inserted rubber 21 having flexibility. The cloth-inserted rubber 21 has a first end being fixed to a fixing member 24s on a cover plate 20 mounted on a side of an outer ring 7 and a second end being fixed to another fixing member 25s on a side of the drive shaft 10 in liquid tight manner in the axial direction of a drive shaft 10. Each of the first and second ends of the cloth-inserted rubber 21 has a face extending in a direction that is perpendicular to the axial direction. The cloth-inserted rubber 21 seals the lubricant at the face of said each of the first and second ends.

    摘要翻译: 公开了一种用于齿轮联轴器的润滑剂密封结构,其能够牢固地防止由于齿轮联轴器内的轴向和径向方向上的振动等而导致的润滑剂的泄漏。 密封构件是具有柔性的布插入橡胶21。 插入橡胶21的第一端部固定在安装在外圈7侧的盖板20上的固定部件24s上,第二端部固定在驱动轴10的一侧的另一固定部件25s 在驱动轴10的轴向方向上以液密方式。插入橡胶21的第一和第二端中的每一个具有沿与轴向垂直的方向延伸的面。 布插入橡胶21在第一和第二端中的每一个的表面上密封润滑剂。