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公开(公告)号：US20180136252A1
公开(公告)日：2018-05-17
申请号：US15330929
申请日：2016-11-14
CPC分类号： G01Q60/30
摘要： An apparatus for mapping the topography of a sample, comprising a control electrode, an oscillator adapted to, provide an AC signal to the control electrode and the sample, a cantilever having a tip, wherein the cantilever is positioned between the control electrode and the sample, a deflection monitoring component, a controller connected to the deflection monitoring component, and a transducer, wherein the transducer raises or lowers the sample with respect to the cantilever until force balance is achieved.A method of providing a bias for depletion while sensing the DC potential of buried lines comprises the steps of setting an oscillator frequency, and if tip-sample bias is needed, setting a DC source to set the tip-sample bias, and monitoring a ratio of gains of a first amplifier and a second amplifier wherein if the ratio has changed, adjusting the first amplifier to null the 2ω signal.
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公开(公告)号：US10132831B2
公开(公告)日：2018-11-20
申请号：US15330929
申请日：2016-11-14
摘要： An apparatus for mapping the topography of a sample, comprising a control electrode, an oscillator adapted to, provide an AC signal to the control electrode and the sample, a cantilever having a tip, wherein the cantilever is positioned between the control electrode and the sample, a deflection monitoring component, a controller connected to the deflection monitoring component, and a transducer, wherein the transducer raises or lowers the sample with respect to the cantilever until force balance is achieved.A method of providing a bias for depletion while sensing the DC potential of buried lines comprises the steps of setting an oscillator frequency, and if tip-sample bias is needed, setting a DC source to set the tip-sample bias, and monitoring a ratio of gains of a first amplifier and a second amplifier wherein if the ratio has changed, adjusting the first amplifier to null the 2ω signal.
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