Method and apparatus for mass spectrometer diagnostics
    2.
    发明申请
    Method and apparatus for mass spectrometer diagnostics 审中-公开
    质谱仪诊断方法和装置

    公开(公告)号:US20070164205A1

    公开(公告)日:2007-07-19

    申请号:US11333745

    申请日:2006-01-17

    IPC分类号: H01J49/26

    CPC分类号: H01J49/40

    摘要: A mass spectrometer system comprises an internal surface exposed to contamination and an optical sensor assembly positioned so as to monitor a reflection of optical radiation from said internal surface. A method of determining a level of contamination of an internal surface within a mass spectrometer comprises illuminating the internal surface with optical radiation, detecting optical radiation reflected from the internal surface upon illumination, determining a reflectivity value of the internal surface based on the detected optical radiation, and determining the level of contamination based on the reflectivity value.

    摘要翻译: 质谱仪系统包括暴露于污染物的内表面和定位成监测来自所述内表面的光辐射的反射的光学传感器组件。 确定质谱仪内部表面的污染程度的方法包括用光辐射照射内表面,在照射时检测从内表面反射的光辐射,基于检测到的光辐射确定内表面的反射率值 ,并根据反射率值确定污染程度。