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公开(公告)号：US5447173A
公开(公告)日：1995-09-05
申请号：US279165
申请日：1994-07-22
CPC分类号： G05D7/0635 , Y10T137/0357 , Y10T137/7759 , Y10T137/7761
摘要： A mass flow controller comprising (a) a valve casing having a flow path for a fluid; (b) an electromagnetic actuator comprising a stationary yoke made of a soft magnetic material, an electromagnetic coil for magnetizing the stationary yoke, and a movable yoke made of a soft magnetic material and movable toward the stationary yoke, both of the stationary yoke and the movable yoke having a magnetic flux density of 1.5 T or more at 300 AT/m, whereby the temperature elevation of the valve casing is within 4.degree. C. from ambient temperature when the electromagnetic coil is energized; (c) a diaphragm valve means disposed in the flow path for adjusting the degree of opening the flow path; (d) a sensor pipe disposed on the upstream side of the diaphragm valve means and bypassing the flow path; and (e) a pair of sensor coils wound around the sensor pipe on the upstream and downstream sides.
摘要翻译： 一种质量流量控制器，包括（a）具有用于流体的流动路径的阀壳体; （b）电磁致动器，包括由软磁材料制成的静止磁轭，用于磁化固定磁轭的电磁线圈和由软磁材料制成并可朝向静止磁轭移动的可动磁轭，固定磁轭和 在300AT / m时磁通密度为1.5T以上的可动磁轭，由此当电磁线圈通电时，阀壳的温度升高在环境温度4℃以内; （c）设置在流路中用于调节流路开度的隔膜阀装置; （d）设置在隔膜阀装置的上游侧并绕过流路的传感器管; 和（e）在上游侧和下游侧缠绕在传感器管上的一对传感器线圈。
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公开(公告)号：US5711342A
公开(公告)日：1998-01-27
申请号：US495701
申请日：1995-06-27
CPC分类号： G05D7/0635 , Y10T137/0357 , Y10T137/7759 , Y10T137/7761
摘要： A mass flow controller comprising (a) a valve casing having a flow path for a fluid; (b) an electromagnetic actuator comprising a stationary yoke made of a soft magnetic material, an electromagnetic coil for magnetizing the stationary yoke, and a movable yoke made of a soft magnetic material and movable toward the stationary yoke, both of the stationary yoke and the movable yoke having a magnetic flux density of 1.5 T or more at 300 AT/m, whereby the temperature elevation of the valve casing is within 4.degree. C. from ambient temperature when the electromagnetic coil is energized; (c) a diaphragm valve means disposed in the flow path for adjusting the degree of opening the flow path; (d) a sensor pipe disposed on the upstream side of the diaphragm valve means and bypassing the flow path; and (e) a pair of sensor coils wound around the sensor pipe on the upstream and downstream sides.
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公开(公告)号：US5470045A
公开(公告)日：1995-11-28
申请号：US283751
申请日：1994-08-01
申请人： Yoichiro Kazama , Tomihisa Oyama
发明人： Yoichiro Kazama , Tomihisa Oyama
CPC分类号： F16K31/0672 , F16K31/06
摘要： A valve apparatus wherein a diaphragm is provided above a valve seat in the valve body, employing a structure whereby the diaphragm can be depressed onto the valve seat, wherein a means of load is provided to depress the diaphragm, wherein an electromagnetic actuator is installed to separate the diaphragm from the valve seat, wherein a thin plate disc is provided with its center fixed to the periphery of the means of load and wherein a valve stem is positioned being fixed to the center of the thin plate disc. Driving the electromagnetic actuator, the valve stem is pulled up opposing the resilient force of the thin plate disc to allow the diaphragm to restore itself from its status being depressed onto the valve seat, thus controlling the aperture of the valve appropriately and smoothly. This invention therefore can provide a valve unit with a simplified structure but capable of maintaining a high cleanliness and improved flow rate controllability.
摘要翻译： 一种阀装置，其中隔膜设置在阀体中的阀座的上方，采用将隔膜压到阀座上的结构，其中设置负载装置以压下隔膜，其中安装有电磁致动器， 将隔膜与阀座分开，其中薄板盘的中心固定在负载装置的周边，并且其中阀杆定位成固定在薄板盘的中心。 驱动电磁执行器时，阀杆与薄板盘的弹力相对地拉起，以使隔膜从其被压下到阀座上的状态恢复，从而适当且平稳地控制阀的孔径。 因此，本发明可以提供具有简化结构但能够保持高清洁度和改进的流量可控性的阀单元。
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